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Webinar: Dry etch processing

Event Type
Seminar/Symposium
Sponsor
MNTL
Virtual
wifi event
Date
Apr 28, 2020   12:00 pm  
Speaker
Yaguang Lian, Holonyak MNTL Research Engineer
Views
23
Originating Calendar
HMNTL Calendar

Register for the meeting at the link above.

Yaguang Lian will explain the principles of dry etching and the basic structures of RIE and ICP systems. He will discuss factors to consider on the design of etching recipes for Si, SiO2 and Si3N4 using fluorine chemistries.

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