HMNTL Master Calendar

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Webinar: Using contrast curve in Electron Beam Lithography (EBL) process development

Event Type
Seminar/Symposium
Sponsor
MNTL
Location
https://illinois.zoom.us/meeting/register/vp0pf-iprDkrcmDpRSAKnlF8ffHOOwEx4Q
Date
Apr 14, 2020   12:00 pm  
Speaker
Edmond Chow, Holonyak MNTL Senior Research Engineer
Views
38
Originating Calendar
HMNTL Calendar

Register in advance for this meeting at the above link.

Edmond Chow will explain how to measure and use contrast curve in electron beam lithography (EBL) process. He will share practical tips and applications on using contrast curve in EBL process and show how to improve your EBL effectiveness and success including migration to a new, higher energy, EBL system.

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